AMOLF NanoLabCobra
vendorOxford Instruments
typeOxford PlasmaPro100 Cobra
extensionsICP
applicationEtching
RIE systems
ownerAMOLF NanoLab
relevant informationAvailable chemistries: CHF3, SF6, O2, Ar, C4F8, CF4, HBr, Cl2. Specimen: up to wafer 100 mm
Amsterdam Research Facilities
access to high-end research instruments, facilities and expertise