AMOLF NanoLabFEI Helios
vendorFEI
typeFEI Helios Nanolab 600 Dualbeam FIB/SEM
extensionsGIS Pt, SiO2, XeF2, C
applicationIon beam technology
Dual beam
ownerAMOLF NanoLab
relevant informationSpecimen: up to wafer 100 mm
access to high-end research instruments, facilities and expertise
vendorFEI
typeFEI Helios Nanolab 600 Dualbeam FIB/SEM
extensionsGIS Pt, SiO2, XeF2, C
applicationIon beam technology
Dual beam
ownerAMOLF NanoLab
relevant informationSpecimen: up to wafer 100 mm