AMOLF NanoLabFEI Quanta
vendorFEI
typeFEI Quanta 650 FEG
extensionslow vacuum FEG Sem
applicationInspection/Metrology
CL
ownerAMOLF NanoLab
relevant informationtime resolved CL with fast beam blanking. Specimen: small samples
access to high-end research instruments, facilities and expertise
vendorFEI
typeFEI Quanta 650 FEG
extensionslow vacuum FEG Sem
applicationInspection/Metrology
CL
ownerAMOLF NanoLab
relevant informationtime resolved CL with fast beam blanking. Specimen: small samples