AMOLF NanoLabMa BA6
vendorKarl Suss
typeSuss MABA6 Mask aligner
extensionsSCIL
applicationLithography
Optical
ownerAMOLF NanoLab
relevant informationbottom and top alignment system
access to high-end research instruments, facilities and expertise
vendorKarl Suss
typeSuss MABA6 Mask aligner
extensionsSCIL
applicationLithography
Optical
ownerAMOLF NanoLab
relevant informationbottom and top alignment system