AMOLF NanoLabPlasma 80
vendorOxford Instruments
typeOxford Plasmalab 80+
extensionsICP
applicationEtching
RIE systems
ownerAMOLF NanoLab
relevant informationAvailable chemistries: CHF3, SF6, O2, Ar. Specimen: up to wafer 100 mm
Amsterdam Research Facilities
access to high-end research instruments, facilities and expertise