AMOLF NanoLabSputter coater
vendorEmitech
typeEmitech 575DX sputtercoater
applicationFilm formation
Sputtering
ownerAMOLF NanoLab
relevant informationCr / Au ~ 10 nms. Specimen: up to wafer 100 mm
access to high-end research instruments, facilities and expertise
vendorEmitech
typeEmitech 575DX sputtercoater
applicationFilm formation
Sputtering
ownerAMOLF NanoLab
relevant informationCr / Au ~ 10 nms. Specimen: up to wafer 100 mm