AMOLF NanoLabTencor 500 profiler
vendorTencor
typeKLA-Tencor Alphastep 500
applicationInspection/Metrology
Stylus
ownerAMOLF NanoLab
relevant informationVertical resolution ~angstrom,Horizontal resolution 100 angstrom. Specimen: up to wafer 100 mm
access to high-end research instruments, facilities and expertise
vendorTencor
typeKLA-Tencor Alphastep 500
applicationInspection/Metrology
Stylus
ownerAMOLF NanoLab
relevant informationVertical resolution ~angstrom,Horizontal resolution 100 angstrom. Specimen: up to wafer 100 mm