AMOLF NanoLabVerios
vendorFEI
typeFEI Verios 460
extensionsSTEM EDX EBSD EBIC
applicationInspection/Metrology
EDX
EBSD
ownerAMOLF NanoLab
relevant informationHigh resolution SEM @ low kV; 0.9 nm @1kV, 1.5 nm @ 200V. Specimen: up to wafer 100 mm
Amsterdam Research Facilities
access to high-end research instruments, facilities and expertise