Amsterdam Science Park
IXA
Amsterdam Research Facilities

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Verios

vendorFEI

typeFEI Verios 460

extensionsSTEM EDX EBSD EBIC

applicationInspection/Metrology

ownerAMOLF NanoLab

relevant informationHigh resolution SEM @ low kV; 0.9 nm @1kV, 1.5 nm @ 200V. Specimen: up to wafer 100 mm