AMOLF NanoLabDelta 80
vendorKarl Suss
typeSuss Delta 80 spincoater
applicationLithography
Spin coating
ownerAMOLF NanoLab
relevant informationSpincoating resist on substrates. Specimen: up to wafer 100 mm
access to high-end research instruments, facilities and expertise
vendorKarl Suss
typeSuss Delta 80 spincoater
applicationLithography
Spin coating
ownerAMOLF NanoLab
relevant informationSpincoating resist on substrates. Specimen: up to wafer 100 mm