AMOLF NanoLabKameleon II

vendorPolyteknik

typeFlextura e-beam PVD system

extensionsIBD, Slow shutter, co-evaporation

applicationEvaporation
ion beam assisted and reactive deposition

ownerAMOLF NanoLab

relevant information1 e-beam sources 8 pockets 2 thermal evaporation sources. Specimen: up to wafer 100 mm