AMOLF NanoLabVoyager
vendorRaith
typeRaith Voyager
extensionsstiching free modes Traxx and periodixx, large area
applicationLithography
E-beam
ownerAMOLF NanoLab
relevant informationNano structuring photoresist; writing structures of >10 nm in positive (PMMA) or negative (HSQ) resists. Specimen: up to wafer 100 mm