AMOLF NanoLabXeF2
vendorOwn design
typeXeF2 etcher
applicationEtching
Xenon Difluoride Etching System
ownerAMOLF NanoLab
relevant informationselective Si : SiO2 etch 500 : 1. Specimen: up to wafer 100 mm
Amsterdam Research Facilities
access to high-end research instruments, facilities and expertise